In addition, MEMS sensors are finding their way into an increasing number of industrial applications, including workplace safety systems. Equipment position sensing, impact detection, and roll-over ...

MEMS sensors have many applications in measuring either linear acceleration along one or several axis, or angular motion about one or several axis as an input to control a system (Figure 1). Figure 1.

Micro-mechanical systems (MEMS) have become common. They are used for acceleration measurement in a multitude of designs, from in-vehicle systems to fitness trackers. Figure 1 shows the operation ...

The MEMSIC MXC626Xc accelerometer is based on a thermal technique that enables ... Thanks to its patented thermal heated-gas principle of measuring acceleration ... (MEMS) accelerometers, ...

TDK Corporation has expanded its MEMS inertial sensors portfolio with the Tronics AXO315T0, a high-temperature MEMS ...

Designers can use resistive IC-based thin-film microheating elements to manufacture relatively low-cost integrated MEMS accelerometers in a standard CMOS process. This novel method, developed by ...

Their research (DOI: 10.1038/s41378-024-00826-x), published in Microsystems & Nanoengineering on March 5, 2025, introduces a MEMS accelerometer featuring an advanced anti-spring mechanism.

A schematic of the accelerometer. a Typical structure of a MEMS comb-type accelerometer, b single-meandered spring, c double-meandered spring. Credit: Microsystems & Nanoengineering (2024). DOI ...