Using a fused silica ‘C’-shaped support structure, a red LED (powered at 0.3 mW) was shone onto a split photodiode, with the MEMS device proof mass mounted in between.

We utilize the third (M3) and fourth (M4) layers for the spring structure, and the M4 and fifth (M5) layers for the proof mass structure. view more Credit: Sensors and Materials, Daisuke Yamane ...

Micro-mechanical systems (MEMS) have become common. They are used for acceleration measurement in a multitude of designs, from in-vehicle systems to fitness trackers. Figure 1 shows the operation ...