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We report a variable optical attenuator (VOA) on silicon-on-insulator (SOI) with folded silicon waveguides and TiW heaters to improve the thermal efficiency. The measured extinction ratio of the ...

Abstract: This article reports the design, fabrication, and measurement of a millimeter-wave (mm-wave) solid-state $\pi $ -match waveguide switch using bulk silicon micromachining. A photogenerated ...