Innovative workflow measures micromirror deformation across full deflection range, improving MEMS design through advanced ...

This paper presents the design, optimization and test of two high-performance navigation grade MEMS resonant accelerometers (MRAs) with specific dynamic ranges of 20g and 50g, tailored for various ...

TDK Corporation has expanded its MEMS inertial sensors portfolio with the Tronics AXO315T0, a high-temperature MEMS ...

This paper reports a designed resonant accelerometer with force rebalance control capability, and compares the performance of the sensor in two different operating modes: the conventional frequency ...