Abstract: Electrode surface roughness can cause a large reduction of the threshold for break down in SF 6 insulated apparatus. This effect is discussed by applying the streamer theory of breakdown to ...

Abstract: By incorporating of a combined mesa cleaning of SF 6 plasma bombarding and HCl rinsing prior to the SiN x passivation, an ultra-low dark current density of 9.1 nA/cm 2 at 180 K under a ...