In situ combustion (ISC) has received much attention in the area of the development of shale oil reservoirs in recent years. The primary mechanism of interest for ISC is the oxidation kinetics of the ...

Capacitive differential pressure sensors have received widespread attention in recent years. This paper reports a MEMS capacitive differential pressure sensor with low temperature sensitivity and high ...

This paper presents a high-sensitivity micromachined resonant differential pressure sensor based on bulk silicon. The sensor includes a sensing unit made of a SOI wafer, which is vacuum packaged by a ...