TDK Corporation has expanded its micro-electro-mechanical system (MEMS) inertial sensors portfolio with the Tronics AXO315 T0 ...

This paper reports a novel structure for monolithically integrated tri-axis high-shock accelerometer. All the tri-axial sensors feature ultra-high resonant frequencies, in which the Z-axis ...

Electric field sensors are widely used in many fields. MEMS based electric field sensor has the advantages of small size, light weight and low power consumption. It can not only be used to upgrade the ...