MEMS accelerometer, the key component of the Inertial Navigation System (INS), has been widely applied in various electronic consumption fields such as mobile phones and unmanned vehicles. However, it ...

Micromachined resonant accelerometers suffer from temperature drift caused by intrinsic thermal stress. In this paper, a novel die-attach structure made of glass is proposed to reduce the thermal ...

Innovative workflow measures micromirror deformation across full deflection range, improving MEMS design through advanced ...