Micromachined resonant accelerometers suffer from temperature drift caused by intrinsic thermal stress. In this paper, a novel die-attach structure made of glass is proposed to reduce the thermal ...

Innovative workflow measures micromirror deformation across full deflection range, improving MEMS design through advanced ...

TDK Corporation has expanded its MEMS inertial sensors portfolio with the Tronics AXO315T0, a high-temperature MEMS ...

A capacitive MEMS accelerometer with superior features, namely low cost, low noise, and low-power consumption, for a large sensor network was developed. To achieve both low noise and low-power ...