Using a fused silica ‘C’-shaped support structure, a red LED (powered at 0.3 mW) was shone onto a split photodiode, with the MEMS device proof mass mounted in between.

Tokyo Institute of Technology President Kazuya Masu and NTT Advanced Technology Corporation succeed in the development of high-sensitivity and low-noise MEMS (1) accelerometer by using multi-layer ...

Micro-mechanical systems (MEMS) have become common. They are used for acceleration measurement in a multitude of designs, from in-vehicle systems to fitness trackers. Figure 1 shows the operation ...