Because thermal MEMS sensors do not have any moving parts, they are very long lived and resistant to shock and vibration. Together, the monolithic design and no capacitive cantilever structure of a ...

A collaborative team is attempting to combine electro-optical physics and a silicon MEMS structure to create a chip-size electron accelerator, in contrast to the mile-long versions in use today.

If you're looking for a challenge, try interconnecting microelectromechanical-systems (MEMS) ICs with conventional ICs and other MEMS ICs. If you've mastered that skill, move to the front of the ...

Portland, Ore. – A MEMS-based implant holds the promise of an artificial ear that would let the deaf hear without external electronics. The device mimics the snail-shaped structure of the inner ear, ...

The study focuses on a tri-resonator MEMS structure—essentially three weakly coupled mechanical elements arranged to detect input signals via shifts in stiffness.

The illustration shows a schematic image of the proposed single-axis MEMS capacitive accelerometer. Input acceleration can be sensed by monitoring the capacitance change between the proof mass and ...

Kazuma Kurihara (Senior Researcher) and Hideki Takagi (Leader), Large Scale Integration Team, the Research Center for Ubiquitous MEMS and Micro Engineering have developed a microelectromechanical ...