Advances in technology to support AI and edge computing will likely drive a shift away from quartz timing toward silicon MEMS and precision timing.

Accurate vacuum sensing is vital in controlling environments where minute changes in pressure can make or break entire processes. Traditional Pirani sensors offer broad range but fall short in ...

In a groundbreaking study, researchers present the first experimental exploration of nonlinear distortion in silicon-based PT-symmetric resonators operating in a broken phase. They pinpoint critical ...

This paper presents a neuromechanical logic gate using Radio Frequency MEMS (RF MEMS) oscillators which are implemented as neurons of Hopfield network constituting an OR logic gate. Auto-correlative ...

This paper presents a novel flexure design geometry that significantly reduces the sensitivity of MEMS resonators to manufacturing variability, specifically critical dimension (CD) loss. The impact of ...

Researchers at the Harvard John A. Paulson School of Engineering and Applied Sciences (SEAS) and Technical University of ...

Explore how MEMS technology is transforming automotive safety and comfort through advanced sensing capabilities.

Microelectromechanical systems (MEMS) sensors have become indispensable in a wide array of technologies—from autonomous vehicles and wearable medical monitors to industrial automation systems.

Innovative workflow measures micromirror deformation across full deflection range, improving MEMS design through advanced ...

The team focused on a tri-resonator MEMS structure made up of three weakly coupled mechanical components. In typical mode-localized setups, changes in input signals shift the system’s resonant ...