N thin films with record-high scandium levels, with exciting potential for ultra-low-power memory devices, as reported by ...

Here we report the fabrication of normal metal - insulator - superconductor (NIS) tunnel junctions using superconducting titanium nitride grown by pulsed laser deposition (PLD). The films for NIS ...

Abstract: To study the thickness uniformity of TiN in FinFETs, the electrical characteristics and reliability of n-FinFETs with ALD TiN and PVD TiN as barrier layer are investigated. Despite almost ...