This paper presents a high-sensitivity micromachined resonant differential pressure sensor based on bulk silicon. The sensor includes a sensing unit made of a SOI wafer, which is vacuum packaged by a ...

In the microelectromechanical systems (MEMS) field, low-range (e.g., kPa or sub-kPa) differential pressure sensors have remained difficult for decades. Generally, there are two unsolved problems that ...

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Netizens mockingly lauded the invention of the concept “pressure differential” and suggested that its inventors had received the Nobel Prize: “From now on, when buildings need to be ...

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