New PMD (Pre-Metal Dielectric) process by employing polysilazane based inorganic SOG (spin-on-glass) is suggested for future VLSI devices. Compared with conventional SOG materials, the film made from ...

As an introduction a brief historical summary of the use of Ag/SnO/sub 2/ in general-purpose and automotive relays is given. The process for manufacturing contact materials by using wet-chemical ...