Innovative workflow measures micromirror deformation across full deflection range, improving MEMS design through advanced ...

TDK Corporation has expanded its MEMS inertial sensors portfolio with the Tronics AXO315T0, a high-temperature MEMS ...

May 26, 2025 Freeform geometry meets AI: A leap forward in MEMS system design New platform combines genetic algorithms with freeform geometry to design resilient, high-performance MEMS accelerometers ...

When applied to a MEMS accelerometer equipped with a mechanical motion preamplifier, the system achieved a 195% boost in its overall performance metric. Gains included dramatic improvements in ...

Their research (DOI: 10.1038/s41378-024-00826-x), published in Microsystems & Nanoengineering on March 5, 2025, introduces a MEMS accelerometer featuring an advanced anti-spring mechanism.

This digital MEMS accelerometer is designed for industrial applications operating under shock and vibration, with a ±14 g input range. The AXO314’s closed-loop architecture provides linearity and high ...

A schematic of the accelerometer. a Typical structure of a MEMS comb-type accelerometer, b single-meandered spring, c double-meandered spring. Image Credit: Microsystems & Nanoengineering The demand ...

A schematic of the accelerometer. a Typical structure of a MEMS comb-type accelerometer, b single-meandered spring, c double-meandered spring. Credit: Microsystems & Nanoengineering (2024). DOI ...