This work demonstrates the first sputtered thin-film nickel-titanium (NiTi) shape-memory alloy (SMA) actuators combined with direct 3D printing of polymeric structures. Resulting actuators are fast to ...

Micromirrors are assembled onto actuator sockets using MEMS assembly techniques to realize a shutter and beam steering VOA. The shutter mirror moves more than 45 microns at 10.6 volts and the angular ...

The global MEMS market, a crucial segment in the semiconductor industry, is projected to soar from over $15.4 billion in 2024 to over $33 billion by 2036. Dominated by leading firms, this sector ...