The global MEMS market, a crucial segment in the semiconductor industry, is projected to soar from over $15.4 billion in 2024 to over $33 billion by 2036. Dominated by leading firms, this sector ...

To improve the sensitivity of the MEMS comb - drive inclinometer three shapes of the comb-drive: ordinary, triangular and curve were investigated. We used typical folded beam for displacement of rotor ...

A three-degrees-of-freedom microelectromechanical systems (MEMS) electrostatic actuator was developed, fabricated, and tested. The actuator utilizes a piston-tube configuration that enables the use of ...

Jun 24, 2025 Linear actuators for micropositioning and precision alignment PI's M-235, L-220, and M-230 actuators deliver precise, compact motion control for optics, photonics, metrology, and ...

Dielectric elastomer actuators (DEAs) are soft transducers well-suited to precise motion applications in robotics and prosthetics. However, low dielectric permittivity or very soft elastomers result ...