We utilize the third (M3) and fourth (M4) layers for the spring structure, and the M4 and fifth (M5) layers for the proof mass structure. view more Credit: Sensors and Materials, Daisuke Yamane ...

Using a fused silica ‘C’-shaped support structure, a red LED (powered at 0.3 mW) was shone onto a split photodiode, with the MEMS device proof mass mounted in between.

Micro-mechanical systems (MEMS) have become common. They are used for acceleration measurement in a multitude of designs, from in-vehicle systems to fitness trackers. Figure 1 shows the operation ...