This paper reports on the design and optimization of a 2-axis, single proof mass MEMS capacitive accelerometer, using the Inertial Measurement Unit (IMU) platform of GlobalFoundries. The accelerometer ...

In this work, MEMS capacitive mirror structure was developed. CVD Amorphous Silicon (α-Si) was used as sacrificial layer. Because of higher reflectance and CMOS compatible consideration, α-Si was used ...

This study investigates Magnetohydrodynamics (MHD) interfacial stability in Bingham fluids moving in micro-porous MEMS structures with fractal space characteristics. The study uses nonlinear boundary ...

The creation of ordered cellular structures is important for tissue engineering research. Here, we present a novel strategy for the assembly of cells into linear arrangements by negative ...

Physics is the search for and application of rules that can help us understand and predict the world around us. Central to physics are ideas such as energy, mass, particles and waves.