The creation of ordered cellular structures is important for tissue engineering research. Here, we present a novel strategy for the assembly of cells into linear arrangements by negative ...

This paper reports on the design and optimization of a 2-axis, single proof mass MEMS capacitive accelerometer, using the Inertial Measurement Unit (IMU) platform of GlobalFoundries. The accelerometer ...

In this work, MEMS capacitive mirror structure was developed. CVD Amorphous Silicon (α-Si) was used as sacrificial layer. Because of higher reflectance and CMOS compatible consideration, α-Si was used ...