We utilize the third (M3) and fourth (M4) layers for the spring structure, and the M4 and fifth (M5) layers for the proof mass structure. view more Credit: Sensors and Materials, Daisuke Yamane ...

Future research will focus on refining bias tuning structures and optimizing interface circuits to further improving the MEMS accelerometer performance. ### References. DOI. 10.1038/s41378-024-00826-x ...

Micro-mechanical systems (MEMS) have become common. They are used for acceleration measurement in a multitude of designs, from in-vehicle systems to fitness trackers. Figure 1 shows the operation ...