A collaborative team is attempting to combine electro-optical physics and a silicon MEMS structure to create a chip-size electron accelerator, in contrast to the mile-long versions in use today.

Kazuma Kurihara (Senior Researcher) and Hideki Takagi (Leader), Large Scale Integration Team, the Research Center for Ubiquitous MEMS and Micro Engineering have developed a microelectromechanical ...

If you're looking for a challenge, try interconnecting microelectromechanical-systems (MEMS) ICs with conventional ICs and other MEMS ICs. If you've mastered that skill, move to the front of the ...

The illustration shows a schematic image of the proposed single-axis MEMS capacitive accelerometer. Input acceleration can be sensed by monitoring the capacitance change between the proof mass and ...

The study focuses on a tri-resonator MEMS structure—essentially three weakly coupled mechanical elements arranged to detect input signals via shifts in stiffness.

Critical CO2 cleaning has some limited success in MEMS fabrication but is not implemented widely. Design of the MEMS structure to be less sensitive to particles is the best way to avoid the problems ...

Because thermal MEMS sensors do not have any moving parts, they are very long lived and resistant to shock and vibration. Together, the monolithic design and no capacitive cantilever structure of a ...