Accurate vacuum sensing is vital in controlling environments where minute changes in pressure can make or break entire processes. Traditional Pirani sensors offer broad range but fall short in ...

In a groundbreaking study, researchers present the first experimental exploration of nonlinear distortion in silicon-based PT-symmetric resonators operating in a broken phase. They pinpoint critical ...

This paper presents a neuromechanical logic gate using Radio Frequency MEMS (RF MEMS) oscillators which are implemented as neurons of Hopfield network constituting an OR logic gate. Auto-correlative ...

This paper presents a novel flexure design geometry that significantly reduces the sensitivity of MEMS resonators to manufacturing variability, specifically critical dimension (CD) loss. The impact of ...

The study focuses on a tri-resonator MEMS structure—essentially three weakly coupled mechanical elements arranged to detect input signals via shifts in stiffness.

Researchers at the Harvard John A. Paulson School of Engineering and Applied Sciences (SEAS) and Technical University of ...

Innovative workflow measures micromirror deformation across full deflection range, improving MEMS design through advanced ...

A new constant-drive method using weakly coupled resonators drastically reduces signal interference in MEMS sensors, enhancing multi-signal detection accuracy.