Simultaneously detecting multiple signals with high precision has long challenged microelectromechanical systems (MEMS) sensors due to unavoidable interference.  ...

May 26, 2025 Freeform geometry meets AI: A leap forward in MEMS system design New platform combines genetic algorithms with freeform geometry to design resilient, high-performance MEMS accelerometers ...

Noise pollution and the associated energy utilization issues are becoming increasingly severe, making it urgent to convert noise energy into usable energy to address pollution problems. This paper ...

At the heart of this breakthrough is a passive PT-symmetric design featuring two acoustically coupled resonators and a SnO₂-coated surface. This configuration enabled the system to exhibit a ...

The passive PT-symmetric model for SAW sensor. a The schematic diagram of the coupled resonators model and the real part of the eigenfrequency surfaces in the parameter space (ω1=ω2=ω0=0,γ0=0 ...

This will not only deepen our understanding of MEMS device behavior from a mathematical perspective but also hold great potential for facilitating the design and optimization of MEMS devices in ...

The miniaturization of resonators for timing applications brings with it new challenges in terms of device optimization. As the device size is reduced, design intolerances lead to more significant ...

The uses for microelectromechanical systems (MEMS) devices have grown exponentially. Applications for MEMS technology include actuators, sensors, inertial measurement units (IMUs), energy harvesters, ...

Using a standard CMOS process, researchers have combined acoustic MEMS and other technology to create a >10-GHz on-chip resonator function for filters and VCOs.