This paper reports a novel structure for monolithically integrated tri-axis high-shock accelerometer. All the tri-axial sensors feature ultra-high resonant frequencies, in which the Z-axis ...

This paper reports on the design and optimization of a 2-axis, single proof mass MEMS capacitive accelerometer, using the Inertial Measurement Unit (IMU) platform of GlobalFoundries. The accelerometer ...

Murata launched a 3-axis accelerometer for the industrial market with high offset stability over temperature and time, low ...